SF₆
Industrial & Specialty Gases
Sulfur Hexafluoride
SF₆ is a potent insulating and arc-quenching gas used in high-voltage electrical equipment and semiconductor processing.
Atomic #
0
Atomic Wt
146.05
CAS #
2551-62-4
Purity
99+%
Available Forms
Compressed gas
Specialty cylinders
Ultra-pure grade
Purity Grades
99.9%
99.99%
99.999%
Applications
Semiconductor
- ✓Etching
- ✓Chamber cleaning
Technical Specifications
| Boiling Point | -63.9°C (sublimes) |
| Density (gas @ STP) | 5.17 kg/m³ |
| Dielectric Strength | 2.5x air |
| GWP | Very high (23500) |
| Environmental | Potent greenhouse gas |
Storage Requirements
Store in standard gas cylinders. Well-ventilated area recommended.
Packaging Options
- •Specialty cylinders
- •High-purity containers
- •Bulk tanks
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